Influence of Beryllium Barrier Layers on the Properties of Mo/Si Multilayer Mirrors

Authors :: R. S. Pleshkov
Franz Schäfers
M. V. Svechnikov
M.G. Sertsu
Andrey Sokolov
Nikolay I. Chkhalo
Vladimir N. Polkovnikov
S. Yu. Zuev
N. N. Salashchenko
Source :: Technical Physics. 64:1688-1691
Publication Year :: 2019
Publisher :: Pleiades Publishing Ltd, 2019.
Abstract: The performance of multilayer Mo/Si mirrors with B4C and Be spacers near a wavelength of 13.5 nm has been studied. It has been shown that four-component Mo/Be/Si/B4C mirrors outperform Mo/Si and Mo/Si/B4C mirrors in reflection coefficient by 2.0 and 1.3%, respectively. In addition, Mo/Si mirrors offer the widest transmission band width at half maximum (Δλ1/2 = 0.535 nm). An explanation for these findings has been given.

Subjects :: Wavelength
Materials science
Physics and Astronomy (miscellaneous)
chemistry
business.industry
Band width
chemistry.chemical_element
Optoelectronics
Beryllium
Reflection coefficient
business

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