Micro- and Nanostructure Analysis of Vapor-Phase-Grown AlN on Face-to-Face Annealed Sputtered AlN/Nanopatterned Sapphire Substrate Templates

Subjects

Subjects :

Materials Chemistry
Electrical and Electronic Engineering
Condensed Matter Physics
Electronic, Optical and Magnetic Materials

Details

ISSN :

1543186X and 03615235

Database :

OpenAIRE

Journal :

Journal of Electronic Materials

Accession number :

edsair.doi...........511d91bf5c11992c0c01fbe763b6b55d

Full Text :

https://doi.org/10.1007/s11664-023-10348-3