A Novel Barometric Pressure Sensor Based on Piezoresistive Effect of Polycrystalline Silicon

Subjects

Subjects :

Polycrystalline silicon
Materials science
business.industry
engineering
Optoelectronics
Electrical and Electronic Engineering
engineering.material
business
Pressure sensor
Piezoresistive effect
Electronic, Optical and Magnetic Materials

Details

ISSN :

22334866 and 15981657

Volume :

19

Database :

OpenAIRE

Journal :

JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE

Accession number :

edsair.doi...........5356370589680f40e37928d635c2b879

Full Text :

https://doi.org/10.5573/jsts.2019.19.2.172