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Application of Micromachining and Micromechanics to Components for Optical Communication

Authors :
Bernd Hillerich
Source :
Micro System Technologies 90 ISBN: 9783642456800
Publication Year :
1990
Publisher :
Springer Berlin Heidelberg, 1990.

Abstract

The state of the art of micromachining technologies and micromechanical structures used in components or subsystems for optical communication systems is reviewed. Numerous examples show that in optical communication both micromachining and micromechanics are applied with considerable success.

Details

ISBN :
978-3-642-45680-0
ISBNs :
9783642456800
Database :
OpenAIRE
Journal :
Micro System Technologies 90 ISBN: 9783642456800
Accession number :
edsair.doi...........5552eeabb6383befc4448e448caed714
Full Text :
https://doi.org/10.1007/978-3-642-45678-7_65