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Ultrathin Diblock Copolymer/Titanium Laminates—A Tool for Nanolithography

Authors :
Peter Eibeck
Stefan Mößmer
Thomas Herzog
Joachim P. Spatz
Martin Möller
Paul J. Ziemann
Source :
Advanced Materials. 10:849-852
Publication Year :
1998
Publisher :
Wiley, 1998.

Subjects

Subjects :
Nanolithography
Materials science
chemistry
Mechanics of Materials
Mechanical Engineering
Copolymer
chemistry.chemical_element
General Materials Science
Composite material
Titanium

Details

ISSN :
15214095 and 09359648
Volume :
10
Database :
OpenAIRE
Journal :
Advanced Materials
Accession number :
edsair.doi...........55ff236fb08d076a82eee361cf6e6154
Full Text :
https://doi.org/10.1002/(sici)1521-4095(199808)10:11<849::aid-adma849>3.0.co;2-5
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