Effect of Ceria Abrasive Synthesized by Supercritical Hydrothermal Method for Chemical Mechanical Planarization

Authors :: Jichul Yang
Seung-Ki Chae
Taesung Kim
Cheolmin Shin
Jinhak Choi
Source :: ECS Journal of Solid State Science and Technology. 8:P3128-P3132
Publication Year :: 2019
Publisher :: The Electrochemical Society, 2019.

Subjects :: Materials science
Chemical engineering
Chemical-mechanical planarization
Abrasive
Hydrothermal circulation
Supercritical fluid
Electronic, Optical and Magnetic Materials

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