Physical origin of suppressed effective work function modulation at boron segregated NiSi∕SiON interface

MLA

Masaki Ogawa, et al. “Physical Origin of Suppressed Effective Work Function Modulation at Boron Segregated NiSi∕SiON Interface.” Journal of Applied Physics, vol. 103, June 2008, p. 124503. EBSCOhost, https://doi.org/10.1063/1.2940136.

APA

Masaki Ogawa, Tomohiro Saito, Shigeaki Zaima, Akira Nishiyama, Katsuyuki Sekine, Masato Koyama, Junji Koga, Tomonori Aoyama, Kazuaki Nakajima, Masahiko Yoshiki, & Yoshinori Tsuchiya. (2008). Physical origin of suppressed effective work function modulation at boron segregated NiSi∕SiON interface. Journal of Applied Physics, 103, 124503. https://doi.org/10.1063/1.2940136

Chicago

Masaki Ogawa, Tomohiro Saito, Shigeaki Zaima, Akira Nishiyama, Katsuyuki Sekine, Masato Koyama, Junji Koga, et al. 2008. “Physical Origin of Suppressed Effective Work Function Modulation at Boron Segregated NiSi∕SiON Interface.” Journal of Applied Physics 103 (June): 124503. doi:10.1063/1.2940136.