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Surface and Subsurface Reaction Mechanisms in Atomic Layer Deposition of Metals and Metal Oxides
- Publication Year :
- 2022
Details
- Language :
- English
- Database :
- OpenAIRE
- Accession number :
- edsair.doi...........58a4c4c6ce35db0158a325b8aad5bc43
- Full Text :
- https://doi.org/10.13140/rg.2.2.36226.15047