Back to Search
Start Over
TEM specimen-induced artefacts of quantifying the chemical composition of SiGe-based epitaxial structures by STEM-based EDXS
- Source :
- Proceedings of the European Microscopy Congress 2020.
- Publication Year :
- 2021
- Publisher :
- Royal Microscopical Society, 2021.
- Subjects :
- Materials science
Chemical engineering
Epitaxy
Chemical composition
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- Proceedings of the European Microscopy Congress 2020
- Accession number :
- edsair.doi...........59c5b7cad0b289cd288f5cd70cf9169e