Realistic treatment for secondary electron emission in hybrid DC/DF capacitively coupled discharge

Subjects

Subjects :

Argon
Materials science
chemistry
Secondary emission
Ionization
Monte Carlo method
Direct current
chemistry.chemical_element
Electric current
Atomic physics
Condensed Matter Physics
Electromagnetic radiation
Charged particle

Details

ISSN :

13616595 and 09630252

Database :

OpenAIRE

Journal :

Plasma Sources Science and Technology

Accession number :

edsair.doi...........59d5acc0aec6333a4d66014ae5b9c9fa

Full Text :

https://doi.org/10.1088/1361-6595/ab6c80