Investigation of Si and Ge growth on Si3N4/Si

MLA

Lei Wang, et al. “Investigation of Si and Ge Growth on Si3N4/Si.” Materials Characterization, vol. 48, Apr. 2002, pp. 189–94. EBSCOhost, https://doi.org/10.1016/s1044-5803(02)00238-3.

APA

Lei Wang, JingChang Tang, Nelson Cue, & Xue-sen Wang. (2002). Investigation of Si and Ge growth on Si3N4/Si. Materials Characterization, 48, 189–194. https://doi.org/10.1016/s1044-5803(02)00238-3

Chicago

Lei Wang, JingChang Tang, Nelson Cue, and Xue-sen Wang. 2002. “Investigation of Si and Ge Growth on Si3N4/Si.” Materials Characterization 48 (April): 189–94. doi:10.1016/s1044-5803(02)00238-3.