Opto-electrical characterization of infrared sensors based on carbon nanotube films

A large array of devices based on a carbon nanotubes film was realized. Electrical characterization by the transfer length method enables the determination of the sheet resistance, and contact resistance, which is extremely low. The resistance dispersion is shown to be due to the film non-uniformity, and is low enough to enable the realization of bolometer focal plane arrays. A decrease of the resistance with the temperature is observed and leads to a TCR of − 0.2 % K − 1 . The strong absorption of carbon nanotubes films in the mid infrared transmission band (3–5 μm and of 8–14 μm) enables us to demonstrate the first carbon nanotubes photo response for these wavelengths.