Back to Search
Start Over
Design and measurement of a piezoresistive ultrasonic sensor based on MEMS
- Source :
- Journal of Semiconductors. 34:074013
- Publication Year :
- 2013
- Publisher :
- IOP Publishing, 2013.
-
Abstract
- A kind of piezoresistive ultrasonic sensor based on MEMS is proposed, which is composed of a membrane and two side beams. A simplified mathematical model has been established to analyze the mechanical properties of the sensor. On the basis of the theoretical analysis, the structural size and layout location of the piezoresistors are determined by simulation analysis. The boron-implanted piezoresistors located on membrane and side beams form a Wheatstone bridge to detect acoustic signal. The membrane-beam microstructure is fabricated integrally by MEMS manufacturing technology. Finally, this paper presents the experimental characterization of the ultrasonic sensor, validating the theoretical model used and the simulated model. The sensitivity reaches −116.2 dB (0 dB reference = 1 V/μbar, 31 kHz), resonant frequency is 39.6 kHz, direction angle is 55°.
- Subjects :
- Microelectromechanical systems
Manufacturing technology
Engineering
Wheatstone bridge
business.industry
Acoustics
Electrical engineering
Condensed Matter Physics
Piezoresistive effect
Signal
Electronic, Optical and Magnetic Materials
law.invention
Integrally closed
law
Materials Chemistry
Ultrasonic sensor
Electrical and Electronic Engineering
business
Sensitivity (electronics)
Subjects
Details
- ISSN :
- 16744926
- Volume :
- 34
- Database :
- OpenAIRE
- Journal :
- Journal of Semiconductors
- Accession number :
- edsair.doi...........5bc533b6b1250e61517eeb74c66cffd6