Atmospheric pressure spatial ALD of Al2O3 thin films for flexible PEALD IGZO TFT application

Authors :: Kwang Su Yoo
Dong-Gyu Kim
Seunghwan Lee
Won-Bum Lee
Jin-Seong Park
Source :: Ceramics International. 48:18803-18810
Publication Year :: 2022
Publisher :: Elsevier BV, 2022.

Subjects :: Process Chemistry and Technology
Materials Chemistry
Ceramics and Composites
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials

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