Back to Search
Start Over
A simple model explaining the preferential (100) orientation of silicon thin films made by aluminum-induced layer exchange
- Source :
- Journal of Crystal Growth. 287:423-427
- Publication Year :
- 2006
- Publisher :
- Elsevier BV, 2006.
-
Abstract
- In the aluminum-induced layer exchange process polycrystalline silicon thin films can be formed on foreign substrates at low temperatures. These films exhibit a preferential (1 0 0) crystal orientation, that depends on the annealing temperature. Further, the preferential orientation is sensitive to the nature of the Al oxide layer between the Si and the Al. A model based on preferential nucleation is presented which elucidates a possible origin of the preferential (1 0 0) orientation and its sensitivity to temperature and the aluminum oxide interlayer.
Details
- ISSN :
- 00220248
- Volume :
- 287
- Database :
- OpenAIRE
- Journal :
- Journal of Crystal Growth
- Accession number :
- edsair.doi...........5cada3e0e0cdba0383af218638d0132c
- Full Text :
- https://doi.org/10.1016/j.jcrysgro.2005.11.057