Back to Search Start Over

A simple model explaining the preferential (100) orientation of silicon thin films made by aluminum-induced layer exchange

Authors :
H.S. Reehal
Stefan Gall
I. Sieber
J. Klein
Jens Schneider
T. Quinn
Walther Fuhs
M. Muske
Andrey Sarikov
Source :
Journal of Crystal Growth. 287:423-427
Publication Year :
2006
Publisher :
Elsevier BV, 2006.

Abstract

In the aluminum-induced layer exchange process polycrystalline silicon thin films can be formed on foreign substrates at low temperatures. These films exhibit a preferential (1 0 0) crystal orientation, that depends on the annealing temperature. Further, the preferential orientation is sensitive to the nature of the Al oxide layer between the Si and the Al. A model based on preferential nucleation is presented which elucidates a possible origin of the preferential (1 0 0) orientation and its sensitivity to temperature and the aluminum oxide interlayer.

Details

ISSN :
00220248
Volume :
287
Database :
OpenAIRE
Journal :
Journal of Crystal Growth
Accession number :
edsair.doi...........5cada3e0e0cdba0383af218638d0132c
Full Text :
https://doi.org/10.1016/j.jcrysgro.2005.11.057