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Dislocation density control of GaN epitaxial film and its photodetector

Authors :
Linhao Li
Yuhui Yang
Guojie Chen
Wenliang Wang
Hongsheng Jiang
Haiyan Wang
Chenguang Zhang
Deqi Kong
Jinghong Zhang
Zhengtang Luo
Guoqiang Li
Source :
Vacuum. 197:110800
Publication Year :
2022
Publisher :
Elsevier BV, 2022.

Subjects

Subjects :
Condensed Matter Physics
Instrumentation
Surfaces, Coatings and Films

Details

ISSN :
0042207X
Volume :
197
Database :
OpenAIRE
Journal :
Vacuum
Accession number :
edsair.doi...........5e524d9f11cc1aa7577eac46a7185b9b
Full Text :
https://doi.org/10.1016/j.vacuum.2021.110800
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