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317 Micro-structure Fabrication Combining Micro-mechanical Fabrication Method and Photolithography
- Source :
- The Proceedings of The Manufacturing & Machine Tool Conference. :225-226
- Publication Year :
- 2001
- Publisher :
- Japan Society of Mechanical Engineers, 2001.
Details
- ISSN :
- 24243094
- Database :
- OpenAIRE
- Journal :
- The Proceedings of The Manufacturing & Machine Tool Conference
- Accession number :
- edsair.doi...........5e53fb82209b0fc7801b95f961fa1e59
- Full Text :
- https://doi.org/10.1299/jsmemmt.2001.3.225