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317 Micro-structure Fabrication Combining Micro-mechanical Fabrication Method and Photolithography

Authors :
Yutaka Yamagata
Joon-wan Kim
Hitoshi Ohmori
Toshiro Higuchi
Shinya Morita
Sei Moriyasu
Source :
The Proceedings of The Manufacturing & Machine Tool Conference. :225-226
Publication Year :
2001
Publisher :
Japan Society of Mechanical Engineers, 2001.

Details

ISSN :
24243094
Database :
OpenAIRE
Journal :
The Proceedings of The Manufacturing & Machine Tool Conference
Accession number :
edsair.doi...........5e53fb82209b0fc7801b95f961fa1e59
Full Text :
https://doi.org/10.1299/jsmemmt.2001.3.225