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Development of capacitive MEMS vibrating ring gyroscope
- Source :
- Optics and Precision Engineering. 27:842-848
- Publication Year :
- 2019
- Publisher :
- Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2019.
Details
- ISSN :
- 1004924X
- Volume :
- 27
- Database :
- OpenAIRE
- Journal :
- Optics and Precision Engineering
- Accession number :
- edsair.doi...........5ec9d122ceac45e30e2bd397a4ac3303
- Full Text :
- https://doi.org/10.3788/ope.20192704.0842