μ-CE Chip Fabricated by Moving Mask Deep X-ray Lithography Technology

The concept of a kind of new micro capillary electrophoresis chip (μ-CE) for DNA analysis is stated. The micro channel array with high aspect ratio is the key part, whose wall should have a slight inclination to ensure the fabrication. It is demonstrated that M2DXL (Moving Mask Deep X-ray Lithography) technology can successfully control the inclination and enables to integrate micro optical components such as micro lens into the chip which improve detection performance greatly.