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A liquid MEMS inclinometer sensor with improved sensitivity
- Source :
- Sensors and Actuators A: Physical. 285:369-377
- Publication Year :
- 2019
- Publisher :
- Elsevier BV, 2019.
-
Abstract
- This paper proposes a liquid microelectromechanical system (MEMS) inclinometer sensor and reports its design, fabrication, and characterization. In the sensor, a liquid metal droplet moves inside an annular-shaped channel, driven by gravity. The position of the liquid metal is reflected by electrodes and the new tilting angle is obtained. A MEMS fabrication process has been developed, and characterisation of the sensor has been carried out. Experiments show that the sensor has a resolution of 3.625° and a wide measuring range of ±45°. In comparison with solid MEMS gyroscopes, the proposed liquid sensor has advantages of fewer manufacturing steps and low costs. Beside, its resilience against impact is outstanding. Its sensitivity and accuracy are more than sufficient for hand held electronics, which are the main targeted applications of the proposed liquid sensor.
- Subjects :
- Liquid metal
Fabrication
Materials science
02 engineering and technology
01 natural sciences
law.invention
law
0103 physical sciences
Electronics
Sensitivity (control systems)
Electrical and Electronic Engineering
Instrumentation
010302 applied physics
Microelectromechanical systems
business.industry
Metals and Alloys
Process (computing)
Gyroscope
021001 nanoscience & nanotechnology
Condensed Matter Physics
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
Optoelectronics
Inclinometer
0210 nano-technology
business
Subjects
Details
- ISSN :
- 09244247
- Volume :
- 285
- Database :
- OpenAIRE
- Journal :
- Sensors and Actuators A: Physical
- Accession number :
- edsair.doi...........5f7e67a1ccdd54f42c8360dc86238775
- Full Text :
- https://doi.org/10.1016/j.sna.2018.11.046