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Solar-Blind Photodetector Based on Single Crystal Ga2O3 Film Prepared by a Unique Ion-Cutting Process

Authors :
Shen Zhenghao
Qiang Liu
Chen Lingli
Wenjie Yu
Ren Qinghua
Tiangui You
Zhao Lantian
Wenhui Xu
Liu Chenhe
Source :
ACS Applied Electronic Materials. 3:451-460
Publication Year :
2020
Publisher :
American Chemical Society (ACS), 2020.

Abstract

A solar-blind photodetector based on single crystal β-Ga2O3 thin film transferred on a SiC substrate with an Al2O3 buffer layer was prepared by a unique ion-cutting process. The structure and micro...

Details

ISSN :
26376113
Volume :
3
Database :
OpenAIRE
Journal :
ACS Applied Electronic Materials
Accession number :
edsair.doi...........601f456c994f71da519e135a0a93dda0
Full Text :
https://doi.org/10.1021/acsaelm.0c00990