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Out-of-Plane Flexible Electronic Whisker Array
- Source :
- 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS).
- Publication Year :
- 2020
- Publisher :
- IEEE, 2020.
-
Abstract
- This study proposes an out-of-plane electronic whisker (e-whisker) array that integrates a three-dimension whisker structure using polydimethylsiloxane (PDMS) and nanocarbon-based strain sensors. The strain sensor is fabricated by a laser-induced graphene from polyimide film and transfer process from polyimide to the PDMS. Fundamental characteristics of an out-of-plane electronic whisker such as sensitivity and response time are studied as well as the demonstration of e-whisker array. By considering the device structure, multiple directional force detection is realized for the first time. Based on the properties of the sensors, simple and low-cost three-dimensional device fabrication process works well for the e-whisker application.
- Subjects :
- Fabrication
Materials science
Polydimethylsiloxane
Graphene
business.industry
Process (computing)
Response time
02 engineering and technology
010402 general chemistry
021001 nanoscience & nanotechnology
01 natural sciences
0104 chemical sciences
law.invention
chemistry.chemical_compound
chemistry
law
Whisker
Optoelectronics
Sensitivity (control systems)
0210 nano-technology
business
Polyimide
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
- Accession number :
- edsair.doi...........612f7472922ee3c730c962201e4eeebb
- Full Text :
- https://doi.org/10.1109/mems46641.2020.9056244