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Out-of-Plane Flexible Electronic Whisker Array

Authors :
Takafumi Yamaguchi
Kuniharu Takei
Takayuki Arie
Seiji Akita
Seiji Wakabayashi
Source :
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS).
Publication Year :
2020
Publisher :
IEEE, 2020.

Abstract

This study proposes an out-of-plane electronic whisker (e-whisker) array that integrates a three-dimension whisker structure using polydimethylsiloxane (PDMS) and nanocarbon-based strain sensors. The strain sensor is fabricated by a laser-induced graphene from polyimide film and transfer process from polyimide to the PDMS. Fundamental characteristics of an out-of-plane electronic whisker such as sensitivity and response time are studied as well as the demonstration of e-whisker array. By considering the device structure, multiple directional force detection is realized for the first time. Based on the properties of the sensors, simple and low-cost three-dimensional device fabrication process works well for the e-whisker application.

Details

Database :
OpenAIRE
Journal :
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
Accession number :
edsair.doi...........612f7472922ee3c730c962201e4eeebb
Full Text :
https://doi.org/10.1109/mems46641.2020.9056244