On The Mechanism of Fatigue in Micron-Scale Structural Films of Polycrystalline Silicon

MLA

C. L. Muhlstein, et al. “On The Mechanism of Fatigue in Micron-Scale Structural Films of Polycrystalline Silicon.” MRS Proceedings, vol. 697, Jan. 2001. EBSCOhost, https://doi.org/10.1557/proc-697-p6.7/b10.7.

APA

C. L. Muhlstein, Robert O. Ritchie, & Eric A. Stach. (2001). On The Mechanism of Fatigue in Micron-Scale Structural Films of Polycrystalline Silicon. MRS Proceedings, 697. https://doi.org/10.1557/proc-697-p6.7/b10.7

Chicago

C. L. Muhlstein, Robert O. Ritchie, and Eric A. Stach. 2001. “On The Mechanism of Fatigue in Micron-Scale Structural Films of Polycrystalline Silicon.” MRS Proceedings 697 (January). doi:10.1557/proc-697-p6.7/b10.7.