Ion beam sputtered Y2O3

MLA

Carmen S. Menoni, et al. “Ion Beam Sputtered Y2O3.” SPIE Proceedings, Dec. 2012. EBSCOhost, https://doi.org/10.1117/12.976808.

APA

Carmen S. Menoni, L. M. Imbler, Peter Langston, Dinesh Patel, Luke A. Emmert, Martin M. Fejer, Roger K. Route, A. S. Markosyan, & Wolfgang Rudolph. (2012). Ion beam sputtered Y2O3. SPIE Proceedings. https://doi.org/10.1117/12.976808

Chicago

Carmen S. Menoni, L. M. Imbler, Peter Langston, Dinesh Patel, Luke A. Emmert, Martin M. Fejer, Roger K. Route, A. S. Markosyan, and Wolfgang Rudolph. 2012. “Ion Beam Sputtered Y2O3.” SPIE Proceedings, December. doi:10.1117/12.976808.