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Fabrication of p-MoTe2/n-MoS2 heterostructure and its electrical characterization

Authors :
Zhengzong Sun
Yangye Sun
Ling Tong
Xiaoxi Li
Jingyi Ma
Xinyu Chen
Xiaojiao Guo
Minxing Zhang
Wenzhong Bao
Simeng Zhang
Source :
2021 5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM).
Publication Year :
2021
Publisher :
IEEE, 2021.

Abstract

We demonstrate the fabrication and characterization of large-area van der Waals heterostructure array composed of chemical vapor deposition (CVD) grown multilayer (ML) 2H-MoTe 2 and single-layer (SL) 2H-MoS 2 , which exhibits excellent rectifier properties. The transfer characteristics of field-effect transistors (FETs) are also investigated. Our work acquires excellent homogeneity and device performance, which facilitates the application of two-dimensional (2D) materials in electronics.

Details

Database :
OpenAIRE
Journal :
2021 5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
Accession number :
edsair.doi...........6532c0c2cecf531bafe130364e0a2e80
Full Text :
https://doi.org/10.1109/edtm50988.2021.9420815