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Fabrication of p-MoTe2/n-MoS2 heterostructure and its electrical characterization
- Source :
- 2021 5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM).
- Publication Year :
- 2021
- Publisher :
- IEEE, 2021.
-
Abstract
- We demonstrate the fabrication and characterization of large-area van der Waals heterostructure array composed of chemical vapor deposition (CVD) grown multilayer (ML) 2H-MoTe 2 and single-layer (SL) 2H-MoS 2 , which exhibits excellent rectifier properties. The transfer characteristics of field-effect transistors (FETs) are also investigated. Our work acquires excellent homogeneity and device performance, which facilitates the application of two-dimensional (2D) materials in electronics.
- Subjects :
- Fabrication
Materials science
business.industry
Transistor
Heterojunction
02 engineering and technology
Chemical vapor deposition
010402 general chemistry
021001 nanoscience & nanotechnology
01 natural sciences
0104 chemical sciences
law.invention
Characterization (materials science)
symbols.namesake
Rectifier
law
symbols
Optoelectronics
Field-effect transistor
van der Waals force
0210 nano-technology
business
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- 2021 5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
- Accession number :
- edsair.doi...........6532c0c2cecf531bafe130364e0a2e80
- Full Text :
- https://doi.org/10.1109/edtm50988.2021.9420815