Highly textured laser annealed Pb(Zr0.52Ti0.48)O3 thin films

RF sputtered amorphous Pb(Zr0.52Ti0.48)O3 (PZT) films (∼300–350 nm in thickness) on {111}Pt/Ti/SiO2/Si or {001}PbTiO3/Pt/Ti/SiO2/Si substrates were laser crystallized to obtain highly textured {111} and {001} PZT thin films. The measured remanent polarizations and coercive fields were 31 µC/cm2 and 86 kV/cm for {001} films and 24 µC/cm2 and 64 kV/cm for {111} oriented PZT films, respectively. The maximum e31,f piezoelectric charge coefficients are ∼ −11 C/m2 for {001} and ∼ −9 C/m2 for {111} PZT thin films respectively.