Impact of features of control systems of the tunneling microscope on the measurement accuracy

A significant number of measurement errors of the surface nanotopography by a tunneling microscope is caused by features of the probe motion control. If the geometry of the needle tip is taken into account in the interpretation of measurements, it is possible to significantly reduce the influence of these errors. It is shown that the shape and size of the tip can be determined from the mathematical model of the scanning process using existing measurements of the nanotopography.