Error Calculation for Accelerometer Calibration by Broadband Random Vibration Analysis

Nowadays, MEMS technologies have been widely developed in different areas of electronics. Many MEMS-devices such as inclinometers based on high-precision accelerometers require high measurement accuracy. For instance, incorrect values in the output signal of an accelerometer as a part of an inclinometer can cause error in angle measurement. In this case there is an issue in the necessity of calculation of errors influencing the output signal of the accelerometer. This paper presents errors calculation method based on broadband random vibration analysis. Particularly, in this paper the calculations of offset error and vibration rectification error (VRE) are performed. The analysis was performed using the developed script in the MATLAB program.