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Effects and Improvements of Coating Induced Polarization Aberration on Lithography Lens Design

Authors :
陈华男 Chen Hua′nan
张巍 Zhang Wei
尚红波 Shang Hongbo
刘春来 Liu Chunlai
Source :
Acta Optica Sinica. 35:0122003
Publication Year :
2015
Publisher :
Shanghai Institute of Optics and Fine Mechanics, 2015.

Subjects

Subjects :
Materials science
business.industry
engineering.material
Induced polarization
Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials
law.invention
Lens (optics)
Optics
Coating
law
engineering
business
Lithography

Details

ISSN :
02532239
Volume :
35
Database :
OpenAIRE
Journal :
Acta Optica Sinica
Accession number :
edsair.doi...........69404af9326e2d82f30fb85e703db8a7

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