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Normal-stress Semiconductor Sensor Using a Combined Square-shaped van der Pauw Structure

Authors :
Chun-Hyung Cho
Jonghoek Kim
Hyuk-Kee Sung
Source :
JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE. 20:135-140
Publication Year :
2020
Publisher :
The Institute of Electronics Engineers of Korea, 2020.

Subjects

Subjects :
Materials science
Van der Pauw method
Stress sensor
Condensed matter physics
Structure (category theory)
Electrical and Electronic Engineering
Semiconductor sensor
Square (algebra)
Electronic, Optical and Magnetic Materials

Details

ISSN :
22334866 and 15981657
Volume :
20
Database :
OpenAIRE
Journal :
JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE
Accession number :
edsair.doi...........6945865f093351166137ce91c573f741
Full Text :
https://doi.org/10.5573/jsts.2020.20.2.135
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