Design and realization of dumbbell-shaped ciliary MEMS vector hydrophone

An excellent hydrophone should have higher sensitivity in its working frequency-band to provide signal with better quality for direction of arrival (DOA). Aiming at the centralized distribution of radiation noise from ships generally below 1 K H z , a Dumbbell-shaped ciliary MEMS vector hydrophone (DCVH) with better sensitivity below 1 K H z is designed in this paper. When detecting the submarine sound signal, Dumbbell-shaped ciliary can obtain the area of receiving sound waves larger than common ciliary structure in the same mass, increase the center of gravity position and increase the moment of force, so as to improve the high sensitivity of hydrophone under the premise of meeting the working frequency-band. In addition, the use of resin as the material for making cilia can bring better performance to hydrophone. Through theoretical analysis and simulation verification by COMSOL5.4, the design is feasible. Finally, DCVH is verified by hydrophone test calibration system, with the sensitivity of - 186.1 d B ( 1 K H z , 0 d B = 1 V / μ P a ), 10.8 d B higher than bionic ciliary MEMS vector hydrophone (CVH), the working frequency-band of 20 H z - 1 K H z , the excellent “8″ character directivity, and concave point depth exceeding 30 d B , which is consistent with theory and simulation results and meets the design requirements.