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A frequency-modulated laser interferometer for nanometer-scale position sensing at cryogenic temperatures

Authors :
Brad Gom
David A. Naylor
Adam Christiansen
Ian Veenendaal
Source :
Photonic Instrumentation Engineering VI.
Publication Year :
2019
Publisher :
SPIE, 2019.

Subjects

Subjects :
Interferometry
Optics
Materials science
Scale (ratio)
business.industry
Position (vector)
law
Nanometre
business
Laser
law.invention

Details

Database :
OpenAIRE
Journal :
Photonic Instrumentation Engineering VI
Accession number :
edsair.doi...........6a75a3284f2d655b4b08d67aad43c7c5
Full Text :
https://doi.org/10.1117/12.2508900
Full Text Access
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