Capacitive sensor system for measurement of temperature and humidity

Dielectrical glass-ceramic materials for capacitive sensors to measure temperature and humidity have been developed. These sensors are suited for temperature measurement between 4.2 and 100 K (low temperature range), but also for temperatures up to 573 K. The measurement of gas humidity is possible between 5 and 95% R.H. The sensors can be used in multicomponent sensor systems under industrial conditions.