Influence of oxygen pressure variations on the optical properties of ion beam sputtered metal oxide coatings

Authors :: Carmen S. Menoni
Roger K. Route
Martin M. Fejer
A. S. Markosyan
Jorge J. Rocca
Peter Langston
B. Regan
B. M. Luther
Dinesh Patel
Alden Curtis
Source :: Frontiers in Optics 2011/Laser Science XXVII.
Publication Year :: 2011
Publisher :: OSA, 2011.
Abstract: Small variations of oxygen partial pressure during the ion beam sputtering of metal oxides strongly influence the optical properties, causing an increase in the absorption loss and a decrease in laser damage fluence.

Subjects :: Materials science
Ion beam
business.industry
Oxide
Partial pressure
Fluence
Metal
chemistry.chemical_compound
Optical coating
Laser damage
chemistry
visual_art
visual_art.visual_art_medium
Optoelectronics
Thin film
business

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