Integrated of PDMS microfluidic channel with cantilever based bio-sensor

A novel cantilever array sensor was micro-fabricated for precise bio-marker detection. The device was fabricated on a SOI wafer with CMOS compatible processes. In order to reducing the effect of k variation due to adsorption, a local biochemical reaction cavity was designed in the free end of the cantilever, the antibody-immobilization was performed in this local area by micro printing technology. This approach can be applied to enhance the performance of all the cantilever-based sensors. The PDMS package is designed to be used for the cantilever sensor which is greatly promoting the practicality of the sensor.