A Thermal Airflow Sensor Based on Mn-Co-Ni-O Thin Film

Authors :: Jie Wang
Yunfei Liu
Zhezheng Zhu
Chengchen Gao
Zhenchuan Yang
Yilong Hao
Source :: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS).
Publication Year :: 2023
Publisher :: IEEE, 2023.

Database :: OpenAIRE
Journal :: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
Accession number :: edsair.doi...........6c300e5368e1e315146646d9c0621c70
Full Text :: https://doi.org/10.1109/mems49605.2023.10052597