High-Rate Deposition of Intrinsic a-Si:H and μc-Si:H Layers for Thin‑Film Silicon Solar Cells using a Dynamic Deposition Process

MLA

T. Zimmermann, et al. “High-Rate Deposition of Intrinsic a-Si:H and Μc-Si:H Layers for Thin‑Film Silicon Solar Cells Using a Dynamic Deposition Process.” MRS Proceedings, vol. 1426, Jan. 2012, pp. 27–32. EBSCOhost, https://doi.org/10.1557/opl.2012.833.

APA

T. Zimmermann, K. Dybek, Aad Gordijn, AJ Arjan Flikweert, F. Stahr, Johann W. Bartha, J. Woerdenweber, & Tsvetelina Merdzhanova. (2012). High-Rate Deposition of Intrinsic a-Si:H and μc-Si:H Layers for Thin‑Film Silicon Solar Cells using a Dynamic Deposition Process. MRS Proceedings, 1426, 27–32. https://doi.org/10.1557/opl.2012.833

Chicago

T. Zimmermann, K. Dybek, Aad Gordijn, AJ Arjan Flikweert, F. Stahr, Johann W. Bartha, J. Woerdenweber, and Tsvetelina Merdzhanova. 2012. “High-Rate Deposition of Intrinsic a-Si:H and Μc-Si:H Layers for Thin‑Film Silicon Solar Cells Using a Dynamic Deposition Process.” MRS Proceedings 1426 (January): 27–32. doi:10.1557/opl.2012.833.