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Laser Lift-Off Process for Additive Micropatterning of Functional Particles and Films

Authors :
Hiroyuki Niino
Ayako Oyane
Tatsuya Shoji
Yasuyuki Tsuboi
Yoshiki Nakata
Hirofumi Miyaji
Aiko Narazaki
Tadatake Sato
Source :
MHS
Publication Year :
2018
Publisher :
IEEE, 2018.

Abstract

Laser lift-off is one of potential candidates for new additive manufacturing technologies since it would realize additive patterning in micron/submicron resolution under atmospheric and room-temperature conditions. We have developed a variety of laser lift-off processes towards electronics, bio-sensing and medical treatments. In this paper, two kinds of laser lift-off methods were introduced: $\underline{L}$aser-$\underline{I}$nduced $\underline{D}$ot $\underline{T}$ransfer (LIDT) for micro/nanodots printing and $\underline{L}$aser-$\underline{I}$nduced $\underline{F}$orward $\underline{T}$ransfer with $\underline{o}$ptical stamp (LIFTop) for micropatterning of various functional films.

Details

Database :
OpenAIRE
Journal :
2018 International Symposium on Micro-NanoMechatronics and Human Science (MHS)
Accession number :
edsair.doi...........6cbaf8239cb1fd9497b35099e62596c9