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Proposal for a complete 3D surface reconstruction using images from a scanning electron microscope (SEM)

Authors :
Mayra Yucely Beb
Sounkalo Dembélé
Akkiz Bekel
Isabelle Jouffroy-Bapicot
Sébastien Thibaud
Nadine Piat
Olivier Lehmann
Jean-Yves Rauch
Patrick Rougeot
Louis-Marie Lebas
Cyril Langlois
Lucian Roiban
Clémentine Fellah
Gilles Cuny
Karine Masenelli-Varlot
Source :
Frontiers in Optics + Laser Science 2022 (FIO, LS).
Publication Year :
2022
Publisher :
Optica Publishing Group, 2022.

Abstract

A three-dimensional model enables the development of accurate solutions to have more information about the thickness, texture, and characteristics of small-size samples for education and metrology applications. This project proposes an idea to obtain a complete 3D surface reconstruction using the application of Pollen 3D for the scanning electron microscope (SEM) images with high magnification. The main objective is to have a set of images of the complete 360° rotation of the sample with a robot inside the chamber of the SEM. Simulation SEM images with Blender (open source application) are proposed for results validation.

Details

Database :
OpenAIRE
Journal :
Frontiers in Optics + Laser Science 2022 (FIO, LS)
Accession number :
edsair.doi...........6d27a2006e1c74bd4d60cab273ca6813
Full Text :
https://doi.org/10.1364/fio.2022.jw5a.69