Mechanical Behavior Experimental Study of Microstructure under Tensile Loading and Electric Field

The mechanics problems can drastically compromise device performance and reliability. To solve these problems, there is a need to develop a fundamental understanding of mechanical behaviors of microstructures in MEMS. Also the increasing use of small micromechanical devices and advanced sensors has led to concern about the failure modes and reliability of these structures. In this paper a micro sample tension machine is made and using it one kind of micro sample fabricated with micromachining is tested. The tension experiments of the micro sample are done under different current to get the comparing data. The experiments yield reasonable and reproducible data. It is shown apparent plastic deformation of the micro sample happens under tension force. Mechanical behavior of the micro sample is distinguished to that of the sample with macro dimension. Micro size effect can be concluded about the micro sample under tension. Under different currents the elastic modulus and the tensile strength of the micro sample decrease with the current increasing. The relationships between them are gotten through experiment. The reliable designing parameters of the material are gained. The glaring outcome is that the uses of the material are depended highly on processing and fabrication techniques. The fabrication techniques can be developed and make the material both practical and reliable.