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Chip-scale pattern modification method for equalizing residual layer thickness in nanoimprint lithography
- Source :
- Japanese Journal of Applied Physics. 57:06HG03
- Publication Year :
- 2018
- Publisher :
- IOP Publishing, 2018.
- Subjects :
- 010302 applied physics
Materials science
Physics and Astronomy (miscellaneous)
Scale (ratio)
business.industry
General Engineering
General Physics and Astronomy
02 engineering and technology
021001 nanoscience & nanotechnology
Residual
Chip
01 natural sciences
Layer thickness
Nanoimprint lithography
law.invention
law
0103 physical sciences
Optoelectronics
0210 nano-technology
business
Subjects
Details
- ISSN :
- 13474065 and 00214922
- Volume :
- 57
- Database :
- OpenAIRE
- Journal :
- Japanese Journal of Applied Physics
- Accession number :
- edsair.doi...........6e4bd1a77bec2daf6b46fdca6f8c3d90
- Full Text :
- https://doi.org/10.7567/jjap.57.06hg03