Design & development of an integrated laser-plasma soft-X-ray projection system

Authors :: F. Bijkerk
H.-J. Voorma
E.J. Pulk
E. Louis
M.J. van der Wiel
J. Verhoeven
E. van der Drift
H. Romijn
Source :: Soft-X-Ray Projection Lithography.
Publication Year :: 1991
Publisher :: Optica Publishing Group, 1991.
Abstract: We report on design and development activities of an integrated soft-X-ray projection system, consisting of all-reflective multilayer optics and a repetitive laser plasma soft-X-ray source.