Three-dimensional simulation of surface topography evolution in the Bosch process by a level set method

MLA

Zai-Fa Zhou, et al. “Three-Dimensional Simulation of Surface Topography Evolution in the Bosch Process by a Level Set Method.” Microsystem Technologies, vol. 21, Sept. 2014, pp. 1587–93. EBSCOhost, https://doi.org/10.1007/s00542-014-2321-6.

APA

Zai-Fa Zhou, Qing-An Huang, Xiao-Qian Li, & Wei-Hua Li. (2014). Three-dimensional simulation of surface topography evolution in the Bosch process by a level set method. Microsystem Technologies, 21, 1587–1593. https://doi.org/10.1007/s00542-014-2321-6

Chicago

Zai-Fa Zhou, Qing-An Huang, Xiao-Qian Li, and Wei-Hua Li. 2014. “Three-Dimensional Simulation of Surface Topography Evolution in the Bosch Process by a Level Set Method.” Microsystem Technologies 21 (September): 1587–93. doi:10.1007/s00542-014-2321-6.