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Understanding the ion acceleration mechanism in bipolar HiPIMS: the role of the double layer structure developed in the after-glow plasma

Authors :
Ioana-Laura Velicu
Vasile Tiron
Source :
Plasma Sources Science and Technology. 29:015003
Publication Year :
2020
Publisher :
IOP Publishing, 2020.

Subjects

Subjects :
Materials science
Glow plasma
High-power impulse magnetron sputtering
Ion acceleration
Condensed Matter Physics
Double layer (plasma physics)
Molecular physics

Details

ISSN :
13616595
Volume :
29
Database :
OpenAIRE
Journal :
Plasma Sources Science and Technology
Accession number :
edsair.doi...........70ae6b50c5b236edb29f2f4789620140
Full Text :
https://doi.org/10.1088/1361-6595/ab6156
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