Angle and energy distributions of sputtered particles from molybdenum (110) surfaces

Authors :: A.A. Kosyachkov
Dimitre Karpuzov
V. T. Cherepin
R.G. Vichev
I.R. Chakarov
Source :: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 39:81-85
Publication Year :: 1989
Publisher :: Elsevier BV, 1989.
Abstract: A secondary ion mass spectrometer with high energy, angle and mass resolution is used to study the energy and angular distributions of ions sputtered from molybdenum (110) surface under 4 keV argon beam bombardment. The sputtering at different beam orientations is also simulated by the MARLOWE computer code. The sputtering yields, in addition to the angular distribution of sputtered particles are assessed as a function of a given angle and energy.

Subjects :: Nuclear and High Energy Physics
Materials science
Spectrometer
Physics::Instrumentation and Detectors
chemistry.chemical_element
Ion
Secondary ion mass spectrometry
Condensed Matter::Materials Science
Angular distribution
chemistry
Physics::Plasma Physics
Molybdenum
Sputtering
Atomic physics
Instrumentation
Beam (structure)
Energy (signal processing)

ISSN :: 0168583X
Volume :: 39
Database :: OpenAIRE
Journal :: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Accession number :: edsair.doi...........70e2e6b4b2624f63e233937351f14209
Full Text :: https://doi.org/10.1016/0168-583x(89)90745-3

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