Optical properties of porous fluoride coating for UV and DUV lasers

Laser-induced damage of thin films coated on optical components used for UV and DUV lasers are serious problems. Gradient refractive index antireflection films are produced by the combination of evaporation and leaching process on fused silica substrate. It has a high laser-induced damage threshold of 7.4-8.7 J/cm 2 at 266 nm. The reflectance is about 0.35%.