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Phase shifting method for non-sinusoidal interference fringes with phase shift error

Authors :
Songzhe Lian
Hiroyuki Kudo
Hidekazu Takano
Haiquan Yang
Atsushi Momose
Source :
Japanese Journal of Applied Physics. 58:112005
Publication Year :
2019
Publisher :
IOP Publishing, 2019.

Abstract

When applying phase shifting interferometry to practical phase measurement, the wave may become non-sinusoidal, and could include some phase shift errors. Prior phase shift algorithms are primarily used for sinusoidal cases, and can cause system errors when used for these non-sinusoidal interference. We propose two phase recovery methods for non-sinusoidal interference fringes: specifically, a least-squares-based fitting algorithm that eliminates system errors using a sufficient number of measured images, and a Fourier transform-based method that effectively suppresses system errors using a lower (or insufficient) number of images. Simulation and experimental results verify the efficacy of the proposed methods.

Details

ISSN :
13474065 and 00214922
Volume :
58
Database :
OpenAIRE
Journal :
Japanese Journal of Applied Physics
Accession number :
edsair.doi...........72cb7bdabf6d37c5f94dc0ee6bfd4145
Full Text :
https://doi.org/10.7567/1347-4065/ab4a96