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Finite element study on indentations into TiN- and multiple TiN/Ti layers on steel

Authors :
H. F. Wang
A. Wagendristel
H. Bangert
P Torzicky
X. Yang
Source :
International Conference on Thin Film Physics and Applications.
Publication Year :
1991
Publisher :
SPIE, 1991.

Abstract

A state-of-the-art finite element program (MARC TM ) is used to derive as much information as possible from the simulation of a 136 degree(s) wedge indentation into multilayer systems. The deformed specimen is compared with experimentally found results as far as an experiment, i.e., a hardness indentation, yields measurable parameters. We suppose some of the surplus information obtained by the simulation to be reliable as well. A first step is undertaken toward the aim of obtaining elastic constants from a hardness or load-depth measurement in multi-phase films.

Details

ISSN :
0277786X
Database :
OpenAIRE
Journal :
International Conference on Thin Film Physics and Applications
Accession number :
edsair.doi...........74135d8a5eee6efc859dccf778122a83
Full Text :
https://doi.org/10.1117/12.47308