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Finite element study on indentations into TiN- and multiple TiN/Ti layers on steel
- Source :
- International Conference on Thin Film Physics and Applications.
- Publication Year :
- 1991
- Publisher :
- SPIE, 1991.
-
Abstract
- A state-of-the-art finite element program (MARC TM ) is used to derive as much information as possible from the simulation of a 136 degree(s) wedge indentation into multilayer systems. The deformed specimen is compared with experimentally found results as far as an experiment, i.e., a hardness indentation, yields measurable parameters. We suppose some of the surplus information obtained by the simulation to be reliable as well. A first step is undertaken toward the aim of obtaining elastic constants from a hardness or load-depth measurement in multi-phase films.
Details
- ISSN :
- 0277786X
- Database :
- OpenAIRE
- Journal :
- International Conference on Thin Film Physics and Applications
- Accession number :
- edsair.doi...........74135d8a5eee6efc859dccf778122a83
- Full Text :
- https://doi.org/10.1117/12.47308