Characterization of line edge roughness using CD SAXS

MLA

George Thompson, et al. “Characterization of Line Edge Roughness Using CD SAXS.” SPIE Proceedings, Mar. 2006. EBSCOhost, https://doi.org/10.1117/12.656829.

APA

George Thompson, Cheng Qing Wang, Wen-Li Wu, Bryan J. Rice, Ronald L. Jones, Steven Weigand, Kwang Woo Choi, Denis T. Keane, & Eric K. Lin. (2006). Characterization of line edge roughness using CD SAXS. SPIE Proceedings. https://doi.org/10.1117/12.656829

Chicago

George Thompson, Cheng Qing Wang, Wen-Li Wu, Bryan J. Rice, Ronald L. Jones, Steven Weigand, Kwang Woo Choi, Denis T. Keane, and Eric K. Lin. 2006. “Characterization of Line Edge Roughness Using CD SAXS.” SPIE Proceedings, March. doi:10.1117/12.656829.