Germainum photodetectors coupled with silicon waveguides on a flexible substrate using nanomembrane transfer printing method

Metal-Semiconductor-Metal structured germanium photodetector is fabricated coupled with silicon waveguide on flexible substrate. Unique nanomembrane transfer printing method for low temperature process and high quality crystalline condition is used for stacking silicon and germanium layers. Optical measurement shows that its dark/photo current characteristics and quantum efficiency of 1.52 um laser source. For device dimensions and materials, FDTD simulation is calculated.